| | Standard Course Syllabus | Course Supervisor | Date of Approval |
| | Dept. of Electrical and Computer Engineering | Valco | 2/05 |
| | 637 | Solid State Microelectronics Laboratory I |
| | 6. | TOPICS AND (# OF LECTURES) |
| | Introduction, Lab safety, Overview of class MOS process (1) |
| | Concept of sheet resistance, Four point probe, Wafer cleaning (1) |
| | Oxidation of silicon (3) |
| | Diffusion (3) |
| | Ion implantation (2) |
| | Metal deposition & contacts (2) |
| | Overview of CVD and epitaxy (1) |
| | Device testing (3) |
| | Photomask fabrication and photo-lithography (3) |
| | Overview of other processes (1) |
| | 7. | CLASS MEETING PATTERN | (For example, "3cl." means 3 48-min classes per week.) |
| | 2 cl, 1 4-hr lab. |
| | Thursday, August 14, 2008 09:18 AM |
| | Page 2 of 3 |